Title:
太陽電池の製造方法
Document Type and Number:
Japanese Patent JP7397732
Kind Code:
B2
Abstract:
To provide a manufacturing method for a solar cell by which the decrease in carrier extraction efficiency can be reduced even when an electrode layer is patterned using a lift-off method.SOLUTION: A manufacturing method for a solar cell includes a step of forming a first conductivity type semiconductor layer 25 and a second conductivity type semiconductor layer 35 on a back surface side of a semiconductor substrate 11, an insulating layer formation step of forming an insulating layer 40 on and across a border between the first conductivity type semiconductor layer 25 and the second conductivity type semiconductor layer 35, a step of forming a resist 50 on the insulating layer 40, a step of forming an electrode layer material film 27Z on and across the first conductivity type semiconductor layer 25, the second conductivity type semiconductor layer 35, the insulating layer 40, and the resist 50, and a step of removing the resist 50 using a lift-off method so as to remove the electrode layer material film 27Z on the resist 50 and form a first electrode layer and a second electrode layer. In the insulating layer formation step, the insulating layer 40 wider than the resist 50 is formed.SELECTED DRAWING: Figure 3C
Inventors:
Kunihiro Nakano
Application Number:
JP2020053233A
Publication Date:
December 13, 2023
Filing Date:
March 24, 2020
Export Citation:
Assignee:
Kaneka Corporation
International Classes:
H01L31/18; H01L31/0224
Domestic Patent References:
| JP2009200267A | ||||
| JP2014067888A | ||||
| JP2006303322A | ||||
| JP2018050006A | ||||
| JP2019169599A | ||||
| JP2016012623A | ||||
| JP2013131586A |
Foreign References:
| US20150144183 | ||||
| US20100154876 |
Attorney, Agent or Firm:
Yuichi Niiyama
Ryuta Kato
Ryuta Kato