Title:
【発明の名称】粒子線機器の検出器対物レンズ
Document Type and Number:
Japanese Patent JP2789094
Kind Code:
B2
Abstract:
A detector objective forms a component of an electron-optical column of a scanning electron microscope, the detector objective being composed of an asymmetrical magnetic lens, an electrostatic immersion lens generating a substantially rotationally symmetrical field, and an annular detector disposed immediately above the magnetic lens body. An electrode of the electrostatic immersion lens is formed as a truncated cone and is arranged in insulated fashion in an upper pole piece of the magnetic lens. The lower pole piece forms the second electrode of the immersion lens. The first and second electrodes are charged with potentials that establish an electrical field for decelerating the primary electrons, the electrical field overlying the focusing magnetic field.
More Like This:
| JPS55159554 | ELECTRON LENS |
| JPH06181041 | SCANNING ELECTRON MICROSCOPE |
Inventors:
YURUGEN FUROOJEN
HANSUPEETAA FUOIERUBAUMU
HANSUPEETAA FUOIERUBAUMU
Application Number:
JP31181687A
Publication Date:
August 20, 1998
Filing Date:
December 08, 1987
Export Citation:
Assignee:
II TSUEE TEE INTEGUREITETSUDO SAAKITSUTO TESUCHINGU G FUYUA HARUPURAITAAPURYUUFUTEHINIKU MBH
International Classes:
H01J37/141; G01Q30/02; H01J37/10; H01J37/145; H01J37/244; H01J37/28; G01Q90/00; (IPC1-7): H01J37/145; H01J37/244
Domestic Patent References:
| JP6095843A | ||||
| JP61131353A | ||||
| JP6062048A | ||||
| JP61104960U |
Attorney, Agent or Firm:
Tomimura Kiyoshi