Title:
【発明の名称】検査用チップ電子部品およびその製造方法
Document Type and Number:
Japanese Patent JP2677243
Kind Code:
B2
Inventors:
Hirokazu Shiromoto
Tomohide Date
Tomohide Date
Application Number:
JP10376195A
Publication Date:
November 17, 1997
Filing Date:
April 27, 1995
Export Citation:
Assignee:
NEC
International Classes:
G01N27/20; G01N3/00; H01L21/66; H05K1/02; H05K3/34; (IPC1-7): H01L21/66; G01N3/00; G01N27/20
Domestic Patent References:
| JP4321251A | ||||
| JP3165541A | ||||
| JP666696A | ||||
| JP4184957A |
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)