PURPOSE: To provide an equipment for the production of a thin glass film, having a reaction vessel with heat resistant property, without being deformed by heat and for the easy processing.
CONSTITUTION: The wall of a reaction vessel has a double wall structure consists of an outer wall 16a and an inner wall 16b. The inner wall 16b is structured with a material selected from one or more of a SiC surface coated heat resistant glass or quarz glass plate, or a high purity carbon plate. Also the outer wall 16a is made of a heat resisting metallic material such as a Ni based alloy, Mo or W and the like. To fix the inner wall 16b to the outer wall 16a, a spacer 17 is inserted between the inner wall 16b and the outer wall 16a, and these parts are clamped by a bolt 18 and a nut 19. The spacer 17, the bolt 18 and the nut 19 are made of the same material with the inner wall 16b.
KANAMORI HIROO
URANO AKIRA
KOGO TAKASHI
HIROSE TOMOKANE
