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Patent Searching and Data


Title:
MASK FOR VAPOR DEPOSITION
Document Type and Number:
Japanese Patent JPH0818368
Kind Code:
A
Abstract:

PURPOSE: To reinforce the connections of the frame parts of the mask for vapor deposition without cutting electrodes by specifying the shape of the mask for the vapor deposition of the electrodes on a tuning-fork vibrator.

CONSTITUTION: The vapor-deposition mask for forming the electrodes 8 and 9 on the tuning-fork vibrator is formed of the thin frame parts. The thin machine parts and frames 5-7 for reinforcement which maintain the shape of the mask are provided, and the thin frame parts are connected to the frames 5-7 outside the vibrator. Therefore, the frame parts of the mask are reinforced without cutting the electrodes, the vapor deposition mask is easily handled even for a fine pattern, and the number of giving in a batch process can be increased.


Inventors:
TAKAYANAGI HIROAKI
Application Number:
JP17346894A
Publication Date:
January 19, 1996
Filing Date:
June 29, 1994
Export Citation:
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Assignee:
MIYOTA KK
International Classes:
H03H9/19; H03H3/02; (IPC1-7): H03H3/02; H03H9/19