Title:
ILLUMINATION OPTICAL APPARATUS
Document Type and Number:
Japanese Patent JP3111476
Kind Code:
B2
Abstract:
PURPOSE: To form the illumination of a semiconductor aligner as a uniform illumination with good efficiency by a method wherein, 2 an optical integrator, at least two reflecting mirrors in which a plurality of belt-shaped reflecting faces are arranged in parallel are arranged so as to be optically crossed at right angles.
CONSTITUTION: A light flux 4 radiated from a laser light-source generation device 1 is reflected by a split-type reflecting mirror 2; in addition, it is reflected vertically by using a split-type reflecting mirror 3. The split-type reflecting mirror 2 is constituted by combining belt-shaped reflecting mirrors 2a, 2b, 2c, ...in such a way that the light flux is reversed by the respective reflecting mirrors. The incident light flux 4 is reflected by the split-type reflecting mirror 2; after that, it is changed to a light flux which has been reversed in a belt shape only in one direction in a light flux 5. Thereby, the loss of the quantity of light is small with reference to a light source whose wavelength is short, optical components are not damaged optically, an optical integrator can be constituted, and the uniformity of the distribution of the quantity of light in an irradiated face can be achieved.
Inventors:
Yukio Ogura
Application Number:
JP61491A
Publication Date:
November 20, 2000
Filing Date:
January 08, 1991
Export Citation:
Assignee:
NEC
International Classes:
G03F7/20; H01L21/027; (IPC1-7): H01L21/027; G03F7/20
Domestic Patent References:
| JP636540A | ||||
| JP636501A | ||||
| JP1295215A |
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)