Title:
IMAGE PICKUP DEVICE AND MANUFACTURE THEREOF
Document Type and Number:
Japanese Patent JP3893806
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To structure an image pickup device by forming an image pickup element and a driver for driving it on the same substrate.
SOLUTION: An applied image pickup element is structured by stationing double gate transistors in a matrix form. The double gate transistor is formed by laminating in the order of a bottom gate electrode, a gate insulating film, a semiconductor film, a BL insulating film, a contact layer, a drain electrode, a source electrode, a gate insulating film, a top gate electrode, and an insulation protective film. A voltage is applied on the top gate electrode and a bottom gate electrode of the double-gate transistor, and the driver for driving the image pickup element can be structured so that TFTs 21 to 25 formed by laminating in the order a gate electrode 31, a gate insulating film 32, a semiconductor layer 33, a BL insulating film, contact layers 35a, 35b, a drain electrode 36a, a source electrode 36b, an interlayer insulation film 37, and an insulation protective film 39 are provided in respective steps RS(1), RS(2), etc.
Inventors:
Kazuhiro Sasaki
Minoru Kamihara
Minoru Kamihara
Application Number:
JP20910699A
Publication Date:
March 14, 2007
Filing Date:
July 23, 1999
Export Citation:
Assignee:
CASIO COMPUTER CO.,LTD.
International Classes:
H01L27/146; G11C19/00; G11C19/28; H04N5/335; H04N5/341; H04N5/369; H04N5/374; H04N5/376; (IPC1-7): H01L27/146; H04N5/335
Domestic Patent References:
| JP8204223A | ||||
| JP6132510A | ||||
| JP5235398A | ||||
| JP6276440A | ||||
| JP6296036A |
Attorney, Agent or Firm:
Kimura Mitsuru