To provide an impression inspection method of an anisotropic conductive film capable of heightening productivity.
This impression inspection method for determining existence of a connection defect of a component on which the anisotropic conductive film is press-bonded is performed as follows: each component of TAB, FOG and a chip is temporarily press-bonded by a contact force of the anisotropic conductive film; a component material finally press-bonded by a tool is supplied to an inspection stage, and the second camera is focused onto the surface of the conductive film; the inspection stage on which the component material is placed is aligned by an alignment signal; the inspection stage is transferred to a primary inspection position by a signal from a PLC control part, and an impression on the component material is captured as an image by the second camera; the inspection stage is furthermore transferred to a secondary inspection position; simultaneously the captured impression image is inspected by an algorithm, and the inspection stage is transferred; thereafter, when the transferred position is not the last inspection position, impression image inspection is repeated; and when the transferred position is the last inspection position, the impression image inspection is finished, and the component material is discharged.
KIM SUN JUNG
Kumon enjoyment
Hisako Yasuko
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