IN-VAPOR PARTICLE SEPARATION APPARATUS AND IN-VAPOR PARTICLE SEPARATION METHOD

Title:

IN-VAPOR PARTICLE SEPARATION APPARATUS AND IN-VAPOR PARTICLE SEPARATION METHOD

Document Type and Number:

Japanese Patent JP2005074245

Kind Code:

A

Abstract:

To provide an in-vapor particle separation apparatus capable of efficiently collecting particles, such as moisture component particles or solid impurity particles, from a vapor; and an in-vapor particle separation method using the apparatus.

The in-vapor particle separation apparatus is equipped with an insulated channel section 7 constituting a part of a vapor channel and electrically insulated from other parts and a collecting electrode 10 arranged at the downstream side of the insulated channel section 7 and for collecting particles in vapor. The insulated channel section 7 is made of a conductive material, and parts 5, 6 of the vapor channel, connected to both the ends of the insulated channel section 7, are made of an insulating material.

Inventors:

HAGIWARA TAKESHI
WATANABE KATSUNOBU
WARASHINA MASAHIKO

Application Number:

JP2003304253A

Publication Date:

March 24, 2005

Filing Date:

August 28, 2003

Export Citation:

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Assignee:

TOSHIBA CORP

International Classes:

B01D45/12; B01D50/00; B03C3/04; B03C3/30; B03C3/45; B01D45/08; (IPC1-7): B03C3/30; B01D45/08; B01D45/12; B01D50/00; B03C3/04; B03C3/45

Attorney, Agent or Firm:

Yoshiaki Inomata
Osamu Kikuchi
Hiroko Inomata

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