Title:
INERTIAL MEASURING DEVICE
Document Type and Number:
Japanese Patent JP2023175166
Kind Code:
A
Abstract:
To provide an inertial measuring device capable of canceling out noise due to stress from a substrate on which two sensors are disposed by obtaining a differential value between detection values of the two sensors.SOLUTION: An inertial measuring device comprises: a substrate; a first inertial sensor disposed on one surface of the substrate and having a first detection axis along the substrate; a second inertial sensor disposed on the one surface of the substrate and having a second detection axis defined in a direction opposite to the first detection axis; and a processing circuit which generates a differential signal between an output signal of the first inertial sensor and an output signal of the second inertial sensor.SELECTED DRAWING: Figure 2
Inventors:
SATO KENTA
Application Number:
JP2022087477A
Publication Date:
December 12, 2023
Filing Date:
May 30, 2022
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
G01P15/08; G01P15/10; G01P21/00
Attorney, Agent or Firm:
Satoshi Nakai
Hiroki Matsuoka
Masayuki Imamura
Hiroki Matsuoka
Masayuki Imamura
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