Title:
INERTIAL SENSOR, AND INERTIAL MEASUREMENT DEVICE
Document Type and Number:
Japanese Patent JP2023162599
Kind Code:
A
Abstract:
To provide an inertial sensor and an inertial measurement device that can easily execute inspection of a movable body without deteriorating noise characteristics.SOLUTION: An inertial sensor comprises a substrate, a sensor element provided on the substrate, and a lid body covering the sensor element. The sensor element has a fixation part fixed to the substrate, a movable body rotatable with a first axis horizontal to the substrate as an axis, a first rotary spring and a second rotary spring connecting the fixation part and the movable body to each other, a movable comb-like electrode group provided on the movable body, a stationary comb-like electrode group facing the movable comb-like electrode group and provided on the substrate, a first electrode for inspection provided on the movable body, and a second electrode for inspection provided on the substrate or the lid body and overlapping the first electrode for inspection in plan view of the substrate. In the plan view, the first electrode for inspection is provided with a plurality of damping adjustment holes.SELECTED DRAWING: Figure 1
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Inventors:
TAKIZAWA TERUO
KOGURE SHOTA
KOGURE SHOTA
Application Number:
JP2022073038A
Publication Date:
November 09, 2023
Filing Date:
April 27, 2022
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
G01P15/125; G01P15/08; G01P21/00
Attorney, Agent or Firm:
Satoshi Nakai
Hiroki Matsuoka
Masayuki Imamura
Hiroki Matsuoka
Masayuki Imamura
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