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Title:
INFRARED DETECTOR
Document Type and Number:
Japanese Patent JP2007033154
Kind Code:
A
Abstract:

To provide an inexpensive infrared detector of which output characteristics can be evaluated even in the stage of a wafer halfway in manufacture.

The infrared detector 10 is provided with both a membrane Ma formed as a thin-walled part of a substrate 1 and a thermocouple T to be used as an infrared detection element. A hot junction Th of the thermocouple T is formed on the membrane Ma, and a cold junction Tc of the thermocouple T is formed on the substrate 1 outside the membrane Ma. The infrared detector detects infrared rays on the basis of an electromotive force associated with a temperature difference which occurs between the hot junction Th and the cold junction Tc of the thermocouple T due to the reception of infrared rays. A heater H is provided for the vicinity of the thermocouple T, and a hot-junction temperature-sensitive resistance element Sh and a cold-junction temperature-sensitive resistance element Sc are each provided on the membrane Ma in the vicinity of the thermocouple T and on the substrate 1 outside the membrane Ma.


Inventors:
WATANABE KAZUAKI
Application Number:
JP2005214863A
Publication Date:
February 08, 2007
Filing Date:
July 25, 2005
Export Citation:
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Assignee:
DENSO CORP
International Classes:
G01J1/02; H01L35/14; H01L35/32
Domestic Patent References:
JP2002340678A2002-11-27
JP2000121432A2000-04-28
JP2000131147A2000-05-12
JP2000146686A2000-05-26
JP2004296959A2004-10-21
Attorney, Agent or Firm:
Kazuyuki Yahagi