Title:
ION SOURCE DEVICE
Document Type and Number:
Japanese Patent JP3254819
Kind Code:
B2
Abstract:
PURPOSE: To enable the continuous operation of an ion source device, which utilizes the electron emitted from a filament to generate the plasma and which draws out the ion from that plasma to generate the ion beam, for a long time by prolonging the lifetime of a filament.
CONSTITUTION: A specified number or more of filaments 3-1 to 3-6 are arranged in a plasma chamber, and at the initial time of the starting of the operation, a specified number of filaments 3-1, 3-2, 3-3 are electrified, and the residual filaments are left as a spare. Ammeters 10-1 to 10-6 and switches 11-1 to 11-6 are connected to each filament 3-1 to 3-6, and each ammeter 10-1 10-6 are connected to a CPU 13 for controlling ON/OFF of the switches 11-1 to 11-6 through comparators 12-1 to 12-6. On the basis of the signal from the comparators 12-1 to 12-6, the CPU 13 is programmed so as to turn on the switches 11-4, 11-5, 11-6 corresponding to the spare filaments 3-4, 3-5, 3-6 for each time when the filament during the operation is seemed to be fused.
More Like This:
| JPH06176726 | POSITIVE AND NEGATIVE CUSP TYPE ION SOURCE |
| WO/2019/118120 | ION SOURCE CRUCIBLE FOR SOLID FEED MATERIALS |
Inventors:
Takayuki Nakayama
▲桑▼原 一
Ichiro Nakamoto
Yoshinori Kawasaki
Tachimi Kawaratani
▲桑▼原 一
Ichiro Nakamoto
Yoshinori Kawasaki
Tachimi Kawaratani
Application Number:
JP13814693A
Publication Date:
February 12, 2002
Filing Date:
June 10, 1993
Export Citation:
Assignee:
Ishikawajima Harima Heavy Industries Co., Ltd.
International Classes:
H01J27/14; H01J27/08; H01J37/08; (IPC1-7): H01J27/08; H01J37/08
Domestic Patent References:
| JP3134937A | ||||
| JP3119636A | ||||
| JP1158641U |
Attorney, Agent or Firm:
Nobuo Kinutani
Previous Patent: ISOTOPE SEPARATOR
Next Patent: CLUTCHLESS SINGLE-SIDE PISTON TYPE VARIABLE DISPLACEMENT COMPRESSOR
Next Patent: CLUTCHLESS SINGLE-SIDE PISTON TYPE VARIABLE DISPLACEMENT COMPRESSOR