Title:
スルホナート誘導体及び潜酸としてのその使用
Document Type and Number:
Japanese Patent JP2005517026
Kind Code:
A
Abstract:
Chemically amplified photoresist compositions comprising, (a) a compound which cures upon the action of an acid or a compound whose solubility is increased upon the action of an acid; and (b) a compound of the formula Ia, Ib, IIa, IIb, IIIa, IIIb, IVa, IVb, Va, Vb or VIa wherein n is 1 or 2; m is 0 or 1; X0 is -[CH2]h-X or -CH-CH2; h is 2, 3, 4, 5 or 6; R1, when n is 1, is for example optionally substituted phenyl, naphthyl, anthracyl, phenanthryl, or heteroaryl; R1, when n is 2, is for example optionally substituted phenylene or naphthylene; R2 for example has one of the meanings of R1; X is for example -OR20, -NR21R22, -SR23; X' is -X1-A3-X-; X1 and X2 are for example -O-, -S- or a direct bond; A3 is e.g. phenylene; R3 has for example one of the meanings given for R1; R4 has for example one of the meaning given for R2; R5 and R6 e.g. are hydrogen; G i.a. is -S- or -O-; R7 when n is 1, e.g. is phenyl, optionally substituted, when n is 2, is for example phenylene; R8 and R9 e.g. are C1-C18alkyl; R10 has one of the meanings given for R7; R11 i.a. is C1-C18alkyl; R12, R13, R14, R15 R16, R17 and R18 for example are hydrogen or C1-C18alkyl; R20, R21, R22 and R23 i.a. are phenyl or C1-C18alkyl; give high resolution with good resist profile.
Inventors:
Kei Matsumoto
Hitoshi Yamato
Asakura Takakage
Murrel, peter
Hitoshi Yamato
Asakura Takakage
Murrel, peter
Application Number:
JP2003566624A
Publication Date:
June 09, 2005
Filing Date:
January 28, 2003
Export Citation:
Assignee:
Ciba Specialty Chemicals Holding Inc.
International Classes:
C07C301/00; C07C309/67; C07C309/68; C07C317/04; C07C317/14; C07C323/66; C07C381/00; C07D209/48; C07D209/76; C07D291/00; C07D333/36; G02B5/20; G03F7/00; G03F7/004; G03F7/038; G03F7/039; H01L21/027; G03F7/075; (IPC1-7): C07C309/68; C07C309/67; C07C317/04; C07C317/14; C07C323/66; C07D209/48; C07D209/76; C07D333/36; G02B5/20; G03F7/004; G03F7/038; G03F7/039; H01L21/027
Domestic Patent References:
| JPH09222725A | 1997-08-26 | |||
| JPH09230588A | 1997-09-05 | |||
| JP2000517067A | 2000-12-19 | |||
| JP2000314956A | 2000-11-14 | |||
| JP2002303979A | 2002-10-18 | |||
| JP2003182218A | 2003-07-03 |
Attorney, Agent or Firm:
Hajime Tsukuni
Fumio Shinoda
Fumio Shinoda