Title:
積層フィルム
Document Type and Number:
Japanese Patent JP6866065
Kind Code:
B2
Abstract:
Provided is a laminated film that has an excellent moisture permeability and gas barrier properties, and has an excellent chemical resistance, transparency, flexibility, and heat resistance. A laminated film of the present invention has, in the following order: a substrate; a first oxide layer containing ZnO, Al, and SiO2; and a second oxide layer formed from SiO2. In an embodiment of the present invention, the thickness of the first oxide layer is 10nm-100nm, and the thickness of the second oxide layer is 10nm-100nm. In an embodiment of the present invention, the laminated film has a moisture permeability not exceeding 3.0×10-2g/m2/24hr and a total visible light transmittance of at least 84%.
Inventors:
Miyamoto Kodai
Tomoki Nashiki
Tomoki Nashiki
Application Number:
JP2016016525A
Publication Date:
April 28, 2021
Filing Date:
January 29, 2016
Export Citation:
Assignee:
NITTO DENKO CORPORATION
International Classes:
B32B9/00; C23C14/34
Domestic Patent References:
| JP2013047363A | ||||
| JP2013189657A | ||||
| JP2015214049A |
Foreign References:
| WO2015111572A1 |
Attorney, Agent or Firm:
Katsuto Momii