PURPOSE: To remove heat generation and a thermal load and to prevent breakage of a microwave introducing window so as to introduce a high power mircowave stably by distributing a magnet field diverging toward the microwave introducing window from a discharge chamber, in a microwave introducing waveguide area so as to reduce an area of the microwave introducing window.
CONSTITUTION: A magnetic field generating coil 7 is provided around a microwave introducing waveguide 5 and a discharging chamber 6, wherein a point of maximum magnetic field intensity is in the discharge chamber 6. Divergent magnetic field distribution is formed with intensity higher than an ECR magnetic field and toward the window all over a region between this maximum point and a microwave introducing window 3. Plasma is generated on a side of the radiating part 8 of this maximum point and most part thereof flows to the radiating part 8 while a part thereof leaks to the window side across this point. A sectional area of the waveguide before and after the microwave introducing window 3 can be reduced to a sectional area size near a cut-off wavelength of a microwave so that a cooling pipe 4 provided on the circumference near the center part, of the microwave introducing window 3 can cool the window 3 efficiently. Consequently, heat generation of the window is effectively suppressed and generation of a large temperature difference between the center part and the circumferential part of the microwave introducing window 3 can be prevented.
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MORIKAWA JUNJI
INOUE NOBUYUKI
TAKAGI KENICHI
TSUBOI HIDEO
HOSHINO AKIRA
