Title:
LASER PROCESSING APPARATUS AND LASER PROCESSING METHOD
Document Type and Number:
Japanese Patent JP2016093833
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a laser processing apparatus and laser processing method in which when processing is performed by feeding a fluid to the air, if feeding of the fluid is ceased, laser light will not reach an object-of-processing surface while being transmitted through the air.SOLUTION: A laser processing apparatus feeds a fluid to the surface of a member to be processed, irradiates pulsating laser light via the fluid, and processes the surface. The laser processing apparatus includes a laser irradiation mechanism that irradiates laser light to the surface of the member to be processed by way of the fluid through an optical window, and a fluid feeding mechanism that feeds the fluid to the surface of the member to be processed along a channel which passes through an external surface of the optical window. If the fluid comes into contact with the laser light emission surface of the optical window, the laser light emission surface of the optical window transmits the laser light. If the fluid does not come into contact with the laser light emission surface of the optical window, the laser light is reflected.SELECTED DRAWING: Figure 1
Inventors:
NOMURA KODAI
SENDA ITARU
SHIIHARA KATSUNORI
ICHIKAWA HIROYA
SENDA ITARU
SHIIHARA KATSUNORI
ICHIKAWA HIROYA
Application Number:
JP2014233028A
Publication Date:
May 26, 2016
Filing Date:
November 17, 2014
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
B23K26/122; B23K26/356
Domestic Patent References:
| JPH05110181A | 1993-04-30 | |||
| JP2003053564A | 2003-02-26 |
Foreign References:
| US20120074110A1 | 2012-03-29 | |||
| WO2011004437A1 | 2011-01-13 |
Attorney, Agent or Firm:
Patent Business Corporation Sakura International Patent Office
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