Title:
光照射装置
Document Type and Number:
Japanese Patent JP7283629
Kind Code:
B2
Abstract:
Provided is a light irradiation device which enables more efficient cooling of an excimer lamp. The present invention comprises a light emitting tube that extends in a first direction and that has transmissivity with respect to ultraviolet light, and a pair of electrodes that are opposite each other with the wall surfaces of the light emitting tube therebetween, and comprises: an excimer lamp that has, as a light emission surface, one wall surface among the wall surfaces of the light emitting tube which are opposite each other in a second direction; a pair of side wall plates that extend in the first direction and that, in a third direction, are opposite each other with the light emitting tube therebetween; a blower mechanism that has a jet opening which is formed to extend in the first direction so as to be, in the second direction, between the light emitting tube and one of the side wall plates, and which jets cooling gas toward the outer wall surface of the light emitting tube on the opposite side from the light emission surface; a suction mechanism that has a suction opening which is formed to extend in the first direction so as to be, in the second direction, between the light emitting tube and the side wall plate on the opposite side from the blower mechanism; and a divider plate that extends in the first direction, that in the second direction is disposed on the opposite side from the light emission surface of the light emitting tube and away from the light emitting tube, and that directly or indirectly connects the pair of side wall plates.
More Like This:
| WO/2013/042700 | EXCIMER LAMP |
| JP4470833 | Light source device |
| WO/2007/139016 | BACKLIGHT DEVICE |
Inventors:
Masato Ozu
Horyu Takezoe
Kazuki Arikawa
Masashi Yamaguchi
Horyu Takezoe
Kazuki Arikawa
Masashi Yamaguchi
Application Number:
JP2022508242A
Publication Date:
May 30, 2023
Filing Date:
March 09, 2021
Export Citation:
Assignee:
Ushio Inc.
International Classes:
H01J65/00; H01J61/52; H01L21/304
Domestic Patent References:
| JP2015230838A | ||||
| JP2012221621A | ||||
| JP2017157458A |
Attorney, Agent or Firm:
Patent Attorney Corporation Junias International Patent Office