Title:
LIGHT SOURCE DEVICE FOR EXPOSURE, ILLUMINATION DEVICE, EXPOSURE APPARATUS, AND EXPOSURE METHOD
Document Type and Number:
Japanese Patent JP2021193429
Kind Code:
A
Abstract:
To provide a light source device for exposure which is capable of highly accurately adjusting alignment even in the case where LEDs are used as a light source, and an illumination device, an exposure apparatus, and an exposure method using the light source device.SOLUTION: A light source device for exposure 70 comprising: a first LED array 71 which emits exposure light; second LED arrays 75 which emit alignment beam; a dichroic mirror on which a dichroic film 81 that allows light of a specific wavelength band to pass through and reflects light of other wavelength bands is arranged in a tilted manner with respect to a common optical axis direction L of the first and second LED arrays 71, 75; and a fly-eye lens 65 to which light is made incident via the dichroic mirror. The first LED array 71 is arranged on an opposite side of the fly-eye lens 65 with respect to the dichroic mirror in the common optical axis direction L, and the second LED arrays 75 are arranged at positions in lateral directions of the dichroic mirror crossing with respect to the common optical axis direction L.SELECTED DRAWING: Figure 4
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Inventors:
YABE SHUNICHI
ENOMOTO YOSHIYUKI
ENOMOTO YOSHIYUKI
Application Number:
JP2020099598A
Publication Date:
December 23, 2021
Filing Date:
June 08, 2020
Export Citation:
Assignee:
V TECH CO LTD
International Classes:
G03F7/20; G02B5/04; G02B5/08; G02B19/00
Attorney, Agent or Firm:
Patent business corporation glory patent office