Title:
線幅誤差取得方法、線幅誤差取得装置および検査システム
Document Type and Number:
Japanese Patent JP6431786
Kind Code:
B2
Inventors:
Hideaki Hashimoto
Hideki Nukata
Kazuhiko Inoue
Hideki Nukata
Kazuhiko Inoue
Application Number:
JP2015035796A
Publication Date:
November 28, 2018
Filing Date:
February 25, 2015
Export Citation:
Assignee:
New Flare Technology Co., Ltd.
International Classes:
G01B11/02; G01B11/24; G01N21/88; G03F1/70; G06T1/00; H01L21/027
Domestic Patent References:
| JP2002081914A | ||||
| JP7174513A | ||||
| JP2011221264A | ||||
| JP2007206487A |
Foreign References:
| US20020028013 |
Attorney, Agent or Firm:
Kurata Masatoshi
Nobuhisa Nogawa
Takashi Mine
Naoki Kono
Tadashi Inoue
Ukai Ken
Atsuko Oaku
Nobuhisa Nogawa
Takashi Mine
Naoki Kono
Tadashi Inoue
Ukai Ken
Atsuko Oaku
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