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Patent Searching and Data


Title:
LINEAR INDUCTION PLASMA PUMP FOR TREATING REACTION FURNACE
Document Type and Number:
Japanese Patent JP2003274633
Kind Code:
A
Abstract:

To provide a plasma pump (20) which discharges particles from a first region (12) including plasma (14) to a second region (16) whose pressure is high, a plasma treating system (10), and a method.

The plasma pump (20) and the plasma treating system (10) are provided with a magnetic field generating member (24) which is arranged inside a passage (30) regulated by an inner wall and an outer wall. The magnetic field generating member (24) generates an AC magnetic field which is stretched almost perpendicularly to the passage (30). An electric field generating member (32) is arranged outside the passage (30), and generates an electric filed in a direction almost perpendicular to the passage (30) and the magnetic filed. In a preferable embodiment, the passage (30) is extended vertically perpendicularly. In another preferable embodiment, the passage (30) is extended horizontally.


Inventors:
MITROVIC ANDREJ
JOHNSON WAYNE
Application Number:
JP2002000375113
Publication Date:
September 26, 2003
Filing Date:
December 25, 2002
Export Citation:
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Assignee:
TOKYO ELECTRON LTD
International Classes:
H05H1/46; B01J19/08; F04B17/00; F04B35/00; H01J37/32; H01L21/3065; H02K44/06; H05H1/54; (IPC1-7): H02K44/06; B01J19/08; H01L21/3065; H05H1/46
Attorney, Agent or Firm:
鈴江 武彦 (外3名)