LINEAR MOTOR, COOLING METHOD AND STAGE DEVICE FOR LINEAR MOTOR, AND ALIGNER

Title:

LINEAR MOTOR, COOLING METHOD AND STAGE DEVICE FOR LINEAR MOTOR, AND ALIGNER

Document Type and Number:

Japanese Patent JP2004215419

Kind Code:

A

Abstract:

To provide a linear motor that allows the uniform distribution of the surface temperature of a jacket without lowering the thrust, and to provide a cooling method and a stage device for the linear motor, and an aligner.

The liner motor having a coil 70 is formed with a first flow path 65a which is formed along the surface of the coil 70 and in which a cooling medium for cooling the coil 70 flows in one direction, and a second flow path 65b which is arranged in parallel with the first flow path 65a and in which the cooling medium flows in the direction opposite to the one direction. The first flow path 65a and the second flow path 65b are disposed on the same plane parallel with the surface of the coil 70.

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Inventors:

KOMINAMI TADAHIRO
KAGEYAMA SHIGEKI

Application Number:

JP2003000450A

Publication Date:

July 29, 2004

Filing Date:

January 06, 2003

Export Citation:

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Assignee:

NIKON CORP

International Classes:

H01L21/68; H01L21/027; H02K9/19; H02K41/02; H02K41/03; (IPC1-7): H02K41/02; H01L21/027; H01L21/68; H02K9/19; H02K41/03

Attorney, Agent or Firm:

Masatake Shiga
Tadashi Takahashi
Masakazu Aoyama
Kazuya Nishi

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