Title:
LIQUID-END DETECTION DEVICE FOR PROCESSING LIQUID REPLENISHMENT SYSTEM
Document Type and Number:
Japanese Patent JP3901846
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To prevent processing liquid from being brought into contact with air in a replenishment container.
SOLUTION: The replenishment container 50 is constituted of the bag-like container 50 made of a soft sheet material. Then, the capacity of the container 50 is reduced according to the feeding-out amount of the developing processing liquid fed out to a processing tank from the container 50 by a supply pump 30. By making a catheter part 24 arranged at the tip of a replenishment channel 20 pierce through the container 50, the container 50 and the channel 20 are connected so as to communicate with each other on a condition that they are hermetically sealed from the outside air. By a liquid-end detection device 90, the liquid-end of the container 50 is detected based on the states of the processing liquid and the air in an air retention device 40 made to intervene in the channel 20.
Inventors:
Masaki Nakamoto
Hiroshi Yoshida
Hiroshi Yoshida
Application Number:
JP16874598A
Publication Date:
April 04, 2007
Filing Date:
June 16, 1998
Export Citation:
Assignee:
Noritsu Koki Co., Ltd.
International Classes:
G03D3/06; (IPC1-7): G03D3/06
Domestic Patent References:
| JP8234397A | ||||
| JP5050460U | ||||
| JP5232664A |
Attorney, Agent or Firm:
Shuichiro Kitamura