Title:
PROCESSING LIQUID REPLENISHMENT SYSTEM
Document Type and Number:
Japanese Patent JP3901845
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To prevent processing liquid from being brought into contact with air in a replenishment container by providing a processing liquid replenishment system with a replenishment channel with a supply pump connecting the replenishment container housing the processing liquid and a processing tank.
SOLUTION: The replenishment container 50 is constituted of the bag-like container 50 consisting of a soft sheet material. Then, the capacity of the container 50 is reduced according to the feeding-out amount of the developing processing liquid fed out to the processing tank from the container 50 by a supply pump 30. By making a catheter part 24 arranged at the tip of the replenishment channel 20 pierce through the container 50, the container 50 and the channel 20 are connected so as to communicate with each other on a condition that they are hermetically sealed from the outside air.
Inventors:
Hiroshi Yoshida
Masaki Nakamoto
Masaki Nakamoto
Application Number:
JP16874498A
Publication Date:
April 04, 2007
Filing Date:
June 16, 1998
Export Citation:
Assignee:
Noritsu Koki Co., Ltd.
International Classes:
G03D3/06; (IPC1-7): G03D3/06
Domestic Patent References:
| JP9269092A | ||||
| JP7295190A | ||||
| JP63125143A | ||||
| JP6012044U | ||||
| JP61106943U |
Attorney, Agent or Firm:
Shuichiro Kitamura