Title:
液体噴射ヘッド、液体噴射装置、圧電素子、超音波センサー及び赤外センサー
Document Type and Number:
Japanese Patent JP5716897
Kind Code:
B2
Abstract:
A method for manufacturing a piezoelectric film includes: forming a piezoelectric precursor film using a precursor solution including a metal compound having Bi, Fe, Mn, Ba, and Ti; and obtaining a piezoelectric film preferentially oriented with the (110) plane by heating and crystallizing the piezoelectric precursor film.
Inventors:
▲濱▼田 泰彰
Application Number:
JP2011014618A
Publication Date:
May 13, 2015
Filing Date:
January 26, 2011
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
H01L41/09; H01L41/18; B41J2/045; B41J2/055; B41J2/135; B41J2/14; B41J2/16; H01L41/187; H01L41/317; H01L41/318; H01L41/39
Domestic Patent References:
| JP2007287745A | ||||
| JP2007221066A | ||||
| JP2006114562A | ||||
| JP2010018452A | ||||
| JP7183397A | ||||
| JP2007017420A | ||||
| JP2004111851A |
Attorney, Agent or Firm:
Hiroyuki Kurihara
Muranaka
Muranaka