Title:
ローレンツアクチュエータ、オブジェクト位置決めシステム、リソグラフィ装置、及びローレンツアクチュエータ動作方法
Document Type and Number:
Japanese Patent JP7018384
Kind Code:
B2
Abstract:
A Lorentz actuator includes: a magnet arrangement; a coil arrangement; and a current controller for supplying a current to the coil arrangement; wherein the magnet and coil arrangement are moveable relative to each other in a main direction, wherein the coil arrangement has a first and second coil portion that are separately operable by the current controller, such that when the same current is supplied to the first coil portion as is supplied to the second coil portion, Lorentz forces generated in the main direction by the first and second coil portions are also the same, and wherein the current controller is configured to supply a current to the first and second coil portions with a phase difference in order to compensate for parasitic reluctance and/or Lorentz forces in an auxiliary direction perpendicular to the main direction.
More Like This:
Inventors:
Fisher, Ulov, Martinus, Josephus
Bourne, Fidelas, Adrienne
Bourne, Fidelas, Adrienne
Application Number:
JP2018506257A
Publication Date:
February 10, 2022
Filing Date:
July 28, 2016
Export Citation:
Assignee:
ASM L Netherlands B.V.
International Classes:
H02P25/064; G03F7/20; H01L21/68; H02K41/03
Domestic Patent References:
| JP2005129941A | ||||
| JP2004120885A | ||||
| JP2004515994A | ||||
| JP2008141165A | ||||
| JP2010142048A |
Foreign References:
| US20060049697 | ||||
| WO2014029678A1 | ||||
| WO2013172262A1 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
Previous Patent: Radical polymerization of ethylene initiated by two organic peroxides with high productivity
Next Patent: Child seat system
Next Patent: Child seat system