LOW DIELECTRIC CONSTANT MATERIAL, INTERLAMINAR INSULATION MEMBRANE AND IC BOARD

Title:

LOW DIELECTRIC CONSTANT MATERIAL, INTERLAMINAR INSULATION MEMBRANE AND IC BOARD

Document Type and Number:

Japanese Patent JP3881420

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To make an insulating material capable of being applied to semiconductor element, etc., have a low dielectric constant, by allowing the material to have a main chain comprising units of a metal element and oxygen, and further allowing the main molecular structure of the main chain to have a connected structure of ring structural units, or a successive chain structure.
SOLUTION: This low dielectric constant material has a main chain comprising M-O unit (M is B, Al, Si, Ti, Ge, Y, Zr, Nb or Ti). A dielectric constant εis shown by formula I (W is a molecular weight; Na is Avogadro's number) by using a density ρ and a polarization α of a molecule constituting the material because the orientation polarization is omitted in a three dimensional network structure. When a conjugated electron is not included in the material, the influence of a molecular structure is small, and a vibrational polarization is shown as the total of contributions from all normal vibration modes by formula II [(μ) is a dipole moment, (a) is the normal vibration mode; Qa is a normal vibration coordinate; ωa is a normal vibration number]. The molecular structure has no chain terminal, and thereby the wa is high and vibrational polarization can be reduced.

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Inventors:

Hiroshi Matsuzaki
Atsushi Nogami
Noriko Yamada
Shingo Katayama

Application Number:

JP9248697A

Publication Date:

February 14, 2007

Filing Date:

April 10, 1997

Export Citation:

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Assignee:

Nippon Steel Corporation

International Classes:

C01B33/113; H01L21/312; C01B35/10; H01L21/316; (IPC1-7): C01B33/113; C01B35/10; H01L21/316

Domestic Patent References:

JP5347298A
JP10032199A

Foreign References:

WO1995024639A1

Attorney, Agent or Firm:

Takashi Ishida
Kazuyuki Nishidate
Toshio Toda
Masaya Nishiyama

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