Title:
LUMINOUS RADIATION ELECTRIC ETHCING PIT FOR A SEMICONDUCTOR
Document Type and Number:
Japanese Patent JPS51150976
Kind Code:
A
Abstract:
PURPOSE:To make a etching pit pattern on the (100) and (11) faces radiating the infrared ray lamp, and flowing current at the same time.
Inventors:
TAKAHASHI KUNIHIKO
UTAKA MASATOSHI
UTAKA MASATOSHI
Application Number:
JP7450875A
Publication Date:
December 24, 1976
Filing Date:
June 20, 1975
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H01L21/3063; H01L21/302; (IPC1-7): H01L21/302