Title:
MAGNETRON CATHODE ELECTRODE FOR SPUTTERING SYSTEM
Document Type and Number:
Japanese Patent JP3925967
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To improve the availability of a target, by making the cross-sectional area of erosion in the vicinity of both edge parts in the longitudinal direction not larger than the cross-sectional area of erosion in the center part in the longitudinal direction in the cross-sectional area of erosion in the reciprocating direction of a magnet unit.
SOLUTION: The upper face of an inside magnet 70 of a magnet unit 50 is an S pole, and the upper face of an outside magnet 72 is an N pole. The vicinity of both edges in the longitudinal direction of the magnet unit has a triangular shape with the edge part as an apex. Namely, in the outside magnet 72, the width becomes smaller from the position A1-A1 showing the maximum width toward the edge part 73, and the edge part 73 forms the apex of the triangle. Then, in the part of this triangle, the shortest distance L2 between the inner circumferential face of the outside magnet 72 and the outer circumferential face of the inside magnet 70 is made smaller than the shortest distance L1 between the outside magnet 72 and inside magnet 70 in the vicinity of the center of the longitudinal direction of the magnet unit.
Inventors:
Tomoo Uchiyama
Tsukasa Kobayashi
Tsukasa Kobayashi
Application Number:
JP26661196A
Publication Date:
June 06, 2007
Filing Date:
September 18, 1996
Export Citation:
Assignee:
Canon ANELVA Corporation
International Classes:
C23C14/35; H01J37/34; (IPC1-7): C23C14/35
Domestic Patent References:
| JP53007586A | ||||
| JP8199354A |
Attorney, Agent or Firm:
Toshiyuki Suzuki
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