Title:
MANUFACTURE OF MINUTE MECHANISM PART
Document Type and Number:
Japanese Patent JP3448988
Kind Code:
B2
Abstract:
PURPOSE: To accurately and simply manufacture a minute mechanism part having a three-dimensional fine complicated shape such as a microsensor, a microactuator or a micromold.
CONSTITUTION: A polymeric sheet 1 is bonded to a base material 6 and selectively removed by excimer laser to form a desired pattern. The bonding and removal processing of the polymeric sheet 1 is repeated to from a multilayered structure having gaps communicating with each other in the laminating direction thereof shown by (f) and the gap parts are filled with a conductive material 11 to form a fine three-dimensional mechanism part. Thereafter, the polymeric sheet 1 and the adhesive 2 are removed.
Inventors:
Takuji Oda
Minoru Kobayashi
Sai Ohta
Minoru Kobayashi
Sai Ohta
Application Number:
JP26700494A
Publication Date:
September 22, 2003
Filing Date:
October 31, 1994
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
B29C65/00; B29C35/08; B29C67/00; B81C1/00; (IPC1-7): B81C1/00; B29C35/08; B29C67/00
Domestic Patent References:
| JP6212477A | ||||
| JP6190929A | ||||
| JP2212131A |
Attorney, Agent or Firm:
Kaneo Miyata (1 person outside)
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