Title:
MANUFACTURE OF SUPERCONDUCTOR ELEMENT
Document Type and Number:
Japanese Patent JPH01135081
Kind Code:
A
Abstract:
PURPOSE:To obtain a superconductor element having superconducting characteristics without wet process by sequentially depositing and forming superconductor layers and insulating layers at predetermined positions with a plurality of masks corresponding to patterning of the element on a substrate. CONSTITUTION:A first superconductor layer 3 is formed on a substrate 2, insulating films 7a, 7b are formed over both ends of the layer 3, and windows 8a, 8b are formed at the center of the layer 3. The windows 8a, 8b are covered with a barrier layer 9, and become the junction faces of a Josephson junction element in which the layer 9 is employed as a tunnel barrier. Accordingly, when the junction element is patterned, so-called wet process, such as photoresist coating, etching washing, etc., is not treated, but sputtering regions are suitably sequentially laminated merely with a metal mask while varying the regions. Accordingly, a malfunction due to the wet process can be adequately avoided, and superconducting characteristics as the junction element can be remarkably stabilized.
Inventors:
MOROHASHI SHINICHI
Application Number:
JP29461987A
Publication Date:
May 26, 1989
Filing Date:
November 20, 1987
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
H01L39/24; H01B13/00; H01L29/78; (IPC1-7): H01B13/00; H01L29/78; H01L39/24
Attorney, Agent or Firm:
Sadaichi Igita
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