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Patent Searching and Data


Title:
MANUFACTURING METHOD OF COMBINATION MASK
Document Type and Number:
Japanese Patent JP2006092752
Kind Code:
A
Abstract:

To provide a manufacturing method of a combination mask capable of removing wrinkles and slacks during a manufacturing process, even when wrinkles and slacks are easily generated on a mask member, and as a result, capable of keeping the positional accuracy of a pattern to be formed, while enabling correspondence with a fine evaporation pattern.

The manufacturing method of the combination mask, composed of a mask member 4 made of thin-film metal 4, a gauze-formed screen-mesh member 3, and a square-shaped frame member 2, formed by stretching the mask member 4 in the frame member 2 via the screen-mesh member 3, comprises a temporary fixing process temporarily fixing the screen-mesh member 3 and the mask member 4, a stretching process imparting the screen-mesh member 3 with tension, after temporarily fixing the mask member 4, and a principal fixing process principally fixing the fixed mask member 4 to the screen-mesh member 3, after imparting the screen-mesh member 3 with the tension.


Inventors:
SAKAI KENTARO
HAGIWARA NORIO
SHIBUYA KIMINOBU
Application Number:
JP2004272755A
Publication Date:
April 06, 2006
Filing Date:
September 21, 2004
Export Citation:
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Assignee:
SONY CORP
International Classes:
H05B33/10; B41C1/14; B41F15/36; C23C14/04; H01L51/50
Attorney, Agent or Firm:
Funabashi Kuninori