Title:
ガス電子増幅器用電極、ガス電子増幅器及びガス電子増幅器用電極の製造方法
Document Type and Number:
Japanese Patent JP6797373
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an electrode for a gas electron amplifier having excellent mass productivity and capable of inhibiting a short circuit from being caused by discharge between electrodes.SOLUTION: Disclosed is an electrode for a gas electron amplifier which has a plurality of through-holes and amplifies electrons in gas. This electrode includes: an insulation layer made of ceramics; and conductive layers formed on both surfaces of the insulation layer.SELECTED DRAWING: Figure 1
Inventors:
Komiya Kazuki
Kohei Fujiwara
Takeshi Kobayashi
Toru Tamagawa
Wakabayashi Masatake
Hideki Hamagaki
Hirai Komei
Shigekatsu Kono
Kohei Fujiwara
Takeshi Kobayashi
Toru Tamagawa
Wakabayashi Masatake
Hideki Hamagaki
Hirai Komei
Shigekatsu Kono
Application Number:
JP2016172301A
Publication Date:
December 09, 2020
Filing Date:
September 02, 2016
Export Citation:
Assignee:
Tokyo Metropolitan Industrial Technology Research Center
RIKEN
Hirai Precision Industry Co., Ltd.
National University Corporation Tokyo University
RIKEN
Hirai Precision Industry Co., Ltd.
National University Corporation Tokyo University
International Classes:
H01J47/02; G01T1/18; H01J9/14; H01J9/44
Domestic Patent References:
JP5151897A | ||||
JP9508750A |
Foreign References:
WO2006115249A1 |
Attorney, Agent or Firm:
Nishizawa Kazumi
Tomoo Katsumata
Ryo Tsuchiya
Yuichiro Shimizu
Masatake Shiga
Suzuki Mitsuyoshi
Tomoo Katsumata
Ryo Tsuchiya
Yuichiro Shimizu
Masatake Shiga
Suzuki Mitsuyoshi