Title:
含フッ素化合物の製法
Document Type and Number:
Japanese Patent JP4079799
Kind Code:
B2
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Inventors:
Aki Yamaoka
Kazuhiko Maeda
Kazuhiko Maeda
Application Number:
JP2003045329A
Publication Date:
April 23, 2008
Filing Date:
February 24, 2003
Export Citation:
Assignee:
Central Glass Co., Ltd.
International Classes:
C08F8/00; G03F7/039; C07C41/05; C07C43/18; C07C67/29; C07C69/653; C08F12/22; C08F20/22; C08F32/04; C08F32/08; H01L21/027
Domestic Patent References:
| JP2003015301A | ||||
| JP2003040926A | ||||
| JP2004219822A |
Attorney, Agent or Firm:
Yoshiaki Hanada