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Title:
マスクブランク、転写用マスク及び転写用マスクの製造方法
Document Type and Number:
Japanese Patent JP5678130
Kind Code:
B2
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Inventors:
橋本 雅広
小湊 淳志
岩下 浩之
野澤 順
Application Number:
JP2013127779A
Publication Date:
February 25, 2015
Filing Date:
June 18, 2013
Export Citation:
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Assignee:
ＨＯＹＡ株式会社
International Classes:
G03F1/58; G03F1/72; G03F1/74; H01L21/027; G03F1/00
Attorney, Agent or Firm:
Takeshi Otsuka



 
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