Title:
MANUFACTURING METHOD OF NANO PARTICLES
Document Type and Number:
Japanese Patent JP2005177983
Kind Code:
A
Abstract:
To provide a manufacturing method of nano particles capable of simply producing nano particles in volume.
Aerosol particles of 10nm to 1000nm are manufactured by a gaseous phase method. A laser beam is applied to the aerosol particles to carry out ablation, thereby manufacturing the nano particles.
Inventors:
KHANG YOON-HO (KR)
Application Number:
JP2004365296A
Publication Date:
July 07, 2005
Filing Date:
December 17, 2004
Export Citation:
Assignee:
SAMSUNG ELECTRONICS CO LTD
International Classes:
B01J19/00; C01B33/021; C01B33/029; C23C14/00; B82B3/00; C23C14/28; (IPC1-7): B82B3/00; B01J19/00; C23C14/00; C23C14/28
Attorney, Agent or Firm:
Mikio Hatta
Yasuo Nara
Etsuko Saito
Katsuyuki Utani
Toshifumi Fujii
Yasuo Nara
Etsuko Saito
Katsuyuki Utani
Toshifumi Fujii
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