Title:
計測装置、撮像装置、計測システム及びプログラム
Document Type and Number:
Japanese Patent JP7277267
Kind Code:
B2
Abstract:
To acquire an image taken of a measurement target in a desirable state when making a measurement based on the image.SOLUTION: The measurement device includes: acquisition means for acquiring an image taken of an object with a flat surface as a measurement target on which a predetermined pattern is projected, information of the predetermined pattern, and information on the relative positional relation between a projection optical system which projected the predetermined pattern and an imaging optical system; determination means for determining the direction of taking the image on the basis of the image taken by the acquisition means, the information on the predetermined pattern, and the information on the relative positional relation; and first notification means for issuing a notification according to the direction of imaging determined by the determination means.SELECTED DRAWING: Figure 3
Inventors:
Mori Taisho
Akinari Takagi
Akinari Takagi
Application Number:
JP2019105611A
Publication Date:
May 18, 2023
Filing Date:
June 05, 2019
Export Citation:
Assignee:
Canon Inc
International Classes:
G01B11/25
Domestic Patent References:
| JP4132905A | ||||
| JP2017049152A | ||||
| JP2013253799A | ||||
| JP2019020307A | ||||
| JP2019120618A | ||||
| JP2015117993A |
Attorney, Agent or Firm:
Patent Attorney Corporation Otsuka International Patent Office
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