Title:
MEASURING DEVICE OF SHAPE OF SURFACE
Document Type and Number:
Japanese Patent JPH04361109
Kind Code:
A
Abstract:
PURPOSE:To enable execution of measurement of the surface of a substance to be inspected which has a transparent part and a non-transparent part, by single scanning. CONSTITUTION:An optical displacement sensor 2 measuring the surface of a substance 1 to be inspected, in a noncontact state, and a contact-type displacement sensor 3 measuring the surface of the substance 1 in a contact state are provided together. A transparent part of the surface of the substance is measured by the contact-type displacement sensor 3, while a non-transparent part thereof is measured by the optical displacement sensor 2, and based on measured values obtained by these sensors 3 and 2, the shape of the surface of the substance to be inspected is computed by an arithmetic means 5.
Inventors:
UESAWA YUTAKA
Application Number:
JP16221091A
Publication Date:
December 14, 1992
Filing Date:
June 06, 1991
Export Citation:
Assignee:
OLYMPUS OPTICAL CO
International Classes:
G01B21/00; G06T7/00; G01B21/20; G06T7/60; (IPC1-7): G01B21/20; G06F15/70
Attorney, Agent or Firm:
Takeji Nara
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