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Patent Searching and Data


Title:
MECHANICAL DETECTION ELEMENT AND DETECTOR
Document Type and Number:
Japanese Patent JP2005300490
Kind Code:
A
Abstract:

To provide a mechanical detection element and a detector high in sensitivity.

The mechanical detection element, wherein the minute force impressed on a cantilever 1A is detected by the change of resistance caused by the piezoelectric resistance effect, is constituted of: the micro-fabricated cantilever 1A; electrodes 2, 3 capable of measuring the resistance value of a resistance body composed of the cantilever 1A, and a carbon nanotube 4 for measuring the objective resistance through the electrodes 2, and 3.


Inventors:
YAMAGUCHI KOJI
HIRAYAMA YOSHIO
Application Number:
JP2004121151A
Publication Date:
October 27, 2005
Filing Date:
April 16, 2004
Export Citation:
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Assignee:
NIPPON TELEGRAPH & TELEPHONE
International Classes:
G01L1/18; B81B3/00; G01L1/14; G01P15/08; G01P15/12; G01P15/125; G01Q20/04; G01Q90/00; (IPC1-7): G01L1/18; B81B3/00; G01L1/14; G01N13/10; G01P15/08; G01P15/12; G01P15/125
Attorney, Agent or Firm:
Michio Takayama