Title:
力学量センサ
Document Type and Number:
Japanese Patent JP6471467
Kind Code:
B2
Abstract:
A dynamic quantity sensor comprising a fixed part (20) fixed to a substrate (11), a floating part (30) supported on the fixed part, a detecting piezoelectric part (42a-42d) that converts strain in the floating part into electrical signals, a detecting pad (62a-62f) formed on the fixed part, and a plurality of detecting wires (72) that connect the detecting piezoelectric part with the detecting pad. The detecting piezoelectric part comprises a lower electrode (43), a piezoelectric material (44) and an upper electrode (45), laminated onto an insulation film (14) on the floating part. A portion of the detecting wires extends from the lower electrode, and the remainder is connected with a first connection site (46) which extends from the upper electrode along the side surface of the piezoelectric material to the insulation film-side and which is composed of the same material as the upper electrode. The detecting wires are provided on the insulation film and are composed of the same material as the lower electrode, the material having a yield stress of 70-800 MPa.
Inventors:
Sakai Mineichi
Tomoya Shiromori
Tomoya Shiromori
Application Number:
JP2014230772A
Publication Date:
February 20, 2019
Filing Date:
November 13, 2014
Export Citation:
Assignee:
株式会社デンソー
International Classes:
G01C19/574; B81B3/00; G01C19/5769; H01L41/047; H01L41/113
Domestic Patent References:
| JP2013219252A | ||||
| JP2010078391A | ||||
| JP2000299512A | ||||
| JP11281372A | ||||
| JP2004085361A | ||||
| JP2013104855A | ||||
| JP9127148A | ||||
| JP2012080682A | ||||
| JP2003185441A |
Foreign References:
| WO2012081457A1 |
Attorney, Agent or Firm:
Kazuyuki Yahagi
Taihei Nonobe
Takanori Kubo
Taihei Nonobe
Takanori Kubo
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