PURPOSE: To avoid damages of an electronic component itself and degradation of a mounting accuracy by a method wherein the electronic component is attracted by driving vacuum attraction holes after foreign substances adhering to the surface of the electronic component are removed by gas spouted out from a gas spouting outlet.

CONSTITUTION: A nitrogen gas spouting outlet 2 and vacuum attraction holes 3 are provided in the tip part 1 of an attraction collet. That is to say, after foreign substances adhering to an electronic component 4 are removed by nitrogen gas spouted out of the spouting outlet 2, the electronic component 4 is attracted to the tip of the attraction collet 1 by the vacuum attraction holes 3. With this constitution, the degradation of the function of the electronic component 4 caused by the damages given to the electronic component itself by the foreign substances and the degradation of a mounting accuracy created by the imperfect attraction caused by the foreign substances can be avoided.