Title:
METHOD AND APPARATUS FOR COOLING OF WINDOW FOIL AT ELECTRON-BEAM ACCELERATOR
Document Type and Number:
Japanese Patent JP3291437
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To sufficiently cool a window foil even when the length in the short- axis direction of a window part is increased in order to increase the running distance of an electron beam.
SOLUTION: In order to cool a window foil for takeout of an electron beam 8 from a scanning electron-beam accelerator which is provided with primary window foils and a secondary window foil at a double window, a cooling wind 19 is blown from both sides with reference to an electron-beam scanning face, the primary foils 14, 15 are cooled, the flow of the cooling wind at the Window foil is reversed in the central part of the window foils, the wind is inhaled from both sides with reference to the electron-beam scanning face so as to be circulated, and the secondary window foil 16 is cooled simultaneously.
Inventors:
Tatsuya Nishimura
Application Number:
JP26731196A
Publication Date:
June 10, 2002
Filing Date:
October 08, 1996
Export Citation:
Assignee:
Ebara Corporation
International Classes:
G21K5/00; G21K5/04; H01J33/04; H05H5/02; H05H7/00; (IPC1-7): G21K5/00; G21K5/04
Domestic Patent References:
| JP794135A | ||||
| JP429900U |
Attorney, Agent or Firm:
Kazuo Shamoto (5 outside)
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