METHOD AND APPARATUS FOR ELIMINATING HARMFUL NITROGEN TRIFLUORIDE

Japanese Patent JP3798822

B2

PURPOSE: To provide a safe, economical method and apparatus for eliminating efficiently harmful nitrogen trifluoride.
CONSTITUTION: Nitrogen trifluoride gas or gas containing nitrogen trifluoride is added with hydrocarbon, and the mixed gas is contacted with a reduction catalyst heated at 200°C or more to decompose harmful nitrogen trifluoride. Additionally, gas containing hydrogen fluoride which was produced by the decomposition of nitrogen trifluoride, after being humidified, is adsorbed by an adsorbent to remove hydrogen fluoride. An apparatus is composed of a mixing means such as a mixing valve 3 which mixes hydrocarbon with nitrogen trifluoride gas or gas containing nitrogen trifluoride, a catalyst column 7 filled with a reduction catalyst for decomposing nitrogen trifluoride in the mixed gas, a heating means such as heater 8 which heats the catalyst in the column 7, a humidification means such as humidifier 13 which humidifies hydrogen fluoride produced by the decomposition of nitrogen trifluoride, and an adsorption column 9 filled with an adsorbent for adsorbing and removing hydrogen fluoride.

Hiroyuki Nishio
Osami Nagano
Shibuya Kazunobu
Hiroshi Ogino

JP29884194A

July 19, 2006

November 08, 1994

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Taiyo Nippon Sanso Co., Ltd.

B01D53/34; B01D53/86; B01D53/54; B01D53/68; (IPC1-7): B01D53/86; B01D53/34; B01D53/54; B01D53/68

JP2303524A
JP2030731B2
JP7116466A
JP7171343A
JP3065219A
JP3065218A
JP6055259B2
JP2245223A
JP6238128A
JP5192538A
JP6026634A

Isamu Hosoi

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