To provide a method for forming a film pattern which accomplishes the thickening of a patterning film obtained by an ink-jet method and makes the thickness of the patterning film uniform by improving the shapes of edges.
Lap coating discharge is repeated in the first discharge process, and in a stage [a dry film S5 in Fig. 6 (a)] in which a film thickness comes to a certain extent close to a desired film thickness, in order to improve the shapes of the edges by the final minute adjustment of the film thickness, the second dispersion of a low concentration is discharged in the second discharge process [Fig. 6 (b)-(e)]. By discharging the second dispersion, a dry film pattern formed on a substrate can be minutely adjusted to have the desired film thickness, the film thickness is made uniform, and the shapes of the edges are improved {Fig. 6 (e)}.
ISHIDA MASAYA
SAKAI MARI
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