Title:
METHOD FOR CHANGING CONCENTRATION OF TREATMENT LIQUID AND TREATMENT LIQUID SUPPLY SYSTEM
Document Type and Number:
Japanese Patent JP3704054
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To reduce a time required for change of a treatment liquid concentration by reducing a drain amount of developer when the concentration of developer is changed.
SOLUTION: The liquid amount inside a tank 81 is measured by a ultrasonic wave sensor 93, a minimum discharge amount of developer to be drained from the tank 81 is calculated by means of an operation device 94 so that a desired set liquid amount and set concentration can be obtained inside the tank 81 based on a liquid amount and a concentration of existing developer inside the tank 81, and a supply amount of developer of high concentration or dilution liquid to be added into the tank 81 is calculated. An existing developer is drained from the inside of the tank 81 according to the calculated value, and thereafter either high concentration developer or dilution liquid is supplied into the tank 81. A drain amount is reduced and a concentration change time is reduced when compared to a conventional method wherein the existing developer in the tank 81 is drained entirely and thereafter developer of a new concentration is stored.
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Inventors:
Takahiro Okubo
Hiroyuki Miyamoto
Hiroyuki Miyamoto
Application Number:
JP2001134103A
Publication Date:
October 05, 2005
Filing Date:
May 01, 2001
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
G03F7/30; H01L21/00; H01L21/027; (IPC1-7): H01L21/027; G03F7/30
Domestic Patent References:
| JP2002324753A | ||||
| JP2000147785A | ||||
| JP8262739A | ||||
| JP6349723A |
Attorney, Agent or Firm:
Tetsuo Kanamoto
Miaki Kametani
Koji Hagiwara
Miaki Kametani
Koji Hagiwara