Title:
METHOD FOR CLEANING APPARATUS FOR BORAZINE COMPOUND AND CONTAINER AND METHOD FOR STORING BORAZINE COMPOUND
Document Type and Number:
Japanese Patent JP2010180176
Kind Code:
A
Abstract:
To provide a means for further improving degree of cleaning in a method for cleaning an apparatus for a borazine compound.
The method for cleaning the apparatus for a borazine compund comprises: a first irradiating step of irradiating a site to be cleaned in the apparatus with a first ultrasonic wave having a frequency of ≤100 kHz; and a second irradiating step of irradiating the site to be cleaned with a second ultrasonic wave having a frequency of >100 kHz.
Inventors:
YAMAMOTO TETSUYA
SHIBATA SHINYA
OKAJIMA MASAYUKI
SHIBATA SHINYA
OKAJIMA MASAYUKI
Application Number:
JP2009026592A
Publication Date:
August 19, 2010
Filing Date:
February 06, 2009
Export Citation:
Assignee:
NIPPON CATALYTIC CHEM IND
International Classes:
C07F5/05
Attorney, Agent or Firm:
Hatta International Patent Corporation
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