Title:
METHOD AND DEVICE FOR CONTROLLING DRIVING OF MICRO MACHINE DEVICE
Document Type and Number:
Japanese Patent JP2008181725
Kind Code:
A
Abstract:
To control a variable-displacement micro machine device more easily and correctly than ever by suppressing generation of hysteresis.
A method of controlling driving of a micro machine device 11 having first and second electrodes 24 and 25 and a dielectric layer 26 between them contains steps of applying a control voltage VC between the first and second electrodes 24 and 25, generating an electrostatic force on the electrodes 24 and 25, causing the first electrode 24 or the second electrode 25 to move, and reversing the polarities of the control voltage VC within a predetermined cycle.
Inventors:
MISHIMA NAOYUKI
YONEZAWA YU
SHIMAUCHI TAKEAKI
XIAOYU MI
TAKANO TAKESHI
AOKI NOBUHISA
NAKATANI YUUTAI
YONEZAWA YU
SHIMAUCHI TAKEAKI
XIAOYU MI
TAKANO TAKESHI
AOKI NOBUHISA
NAKATANI YUUTAI
Application Number:
JP2007013281A
Publication Date:
August 07, 2008
Filing Date:
January 24, 2007
Export Citation:
Assignee:
FUJITSU LTD
FUJITSU MEDIA DEVICE KK
FUJITSU MEDIA DEVICE KK
International Classes:
H01H59/00; B81B3/00
Domestic Patent References:
| JP2006253039A | 2006-09-21 | |||
| JP2006032353A | 2006-02-02 | |||
| JPH10154456A | 1998-06-09 |
Attorney, Agent or Firm:
Yukio Kubo
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