Title:
METHOD AND DEVICE FOR MIXING, DISTRIBUTING AND MOVING CHEMICAL MATERIAL ACCURATELY
Document Type and Number:
Japanese Patent JP3457603
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a chemical material distributing system for semiconductor manufacturing industries for carrying the process chemical materials from bulk sources while keeping high purity states and distributing them accurately without being contaminated.
SOLUTION: Two or more measuring vessels are used and connected to the bulk chemical material sources while interposing receivable lines. Each of the measuring vessels is provided with a pipe to be angled adjustably and swingably to discharge excess of the chemical material by making it flow out by gravity from the measuring vessel in order to adjust the amount of the chemical material to a prescribed desirable level. The level of the chemical material is adjusted only by lifting/lowering of the pipe that is angled swingably and attached to the bottom of the measuring vessel to be rotated. Otherwise, a pipe that is angled to make a vertically up-and-down motion can be used instead of the pipe to be swingably lifted/lowered for discharging the excess of the chemical material.
Inventors:
Leon M Han
Application Number:
JP2000001050A
Publication Date:
October 20, 2003
Filing Date:
January 06, 2000
Export Citation:
Assignee:
Chemflow Systems, Inc.
International Classes:
B01F33/40; B01J4/02; B01J8/00; B01J8/20; B24B37/04; B24B57/02; G05D11/13; H01L21/304; (IPC1-7): B01J4/02; B01F13/02; B01F15/00; B01F15/04; H01L21/304
Domestic Patent References:
| JP588322A | ||||
| JP2107030U |
Attorney, Agent or Firm:
Tadahiko Ito
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