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Title:
METHOD AND DEVICE FOR SURFACE-MACHINING SHEET
Document Type and Number:
Japanese Patent JPH09262762
Kind Code:
A
Abstract:

To improve flattening of the two surfaces of a sheet by a method wherein a sheet is held by a holding device having a holding surface approximately in a shape complementary to the first surface of a sheet, a second surface is machined by a surface machining means, and thereafter, the sheet is held by a holding device having a flat holding surface, and surface processing is applied on the first surface.

When surface processing, such as surface grinding and surface polishing, is applied on the two surfaces of a sheet 1 provided on both surfaces with an uneven surface and a warp, a holding device 2 having a holding surface 2a approximately in a shape complementary to that of the first surface 1a of the sheet 1 is first used. In such a state that the first surface 1a is brought into contact with the holding surface 2a, the sheet 1 is held. Surface machining of the second surface 1b of the sheet 1 is effected until the surface processing attains a broken line, and the second surface 1b of the sheet 1 is surface-machined in a flat. The sheet 1 is turned over, and the sheet 1 is held by a holding device 3 in such a state that the second surface 1b is brought into contact with the holding surface 3a. Surface processing of the first surface 1a of the sheet 1 is effected until surface processing attains a broken line, and both the first and second surfaces 1a and 1b are completely flattened.


Inventors:
TANAKA TOMOAKI
IWAKATA SEIICHI
SEKIKAWA SHOHEI
Application Number:
JP7448896A
Publication Date:
October 07, 1997
Filing Date:
March 28, 1996
Export Citation:
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Assignee:
NAOETSU SEIMITSU KAKO KK
International Classes:
B24B7/17; B24B37/04; B24B37/30; H01L21/304; (IPC1-7): B24B37/04; B24B7/17; H01L21/304
Attorney, Agent or Firm:
Yoshio Arafune (1 person outside)