Title:
METHOD FOR FORMING BURIED TYPE SEALED VOID IN LOW-TEMPERATURE CALCINATED CERAMIC
Document Type and Number:
Japanese Patent JP3893359
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method for forming a buried type hole or channel in a low-temperature calcinated ceramic.
SOLUTION: The method for forming a low-temperature calcinated ceramic (LTCC) device includes the formation of a channel in a first LTCC tape layer. A wax is inserted into the channel. The wax is one type to be burned out at a lower temperature than a sintering temperature for the first LTCC tape layer. At least one second LTCC tape layer is stuck on the first LTCC tape layer to form a stack. The stack is sufficiently pressed to laminate the first and second layers. The laminated layers are calcinated at a sintering temperature to form a ceramic sturcture sintered from the first and second LTCC tape layers, and all or almost of the wax is burned out and removed from the channel.
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Inventors:
Brian Earl Smith
Randy Tea Pike
Sea Michael Newton
Randy Tea Pike
Sea Michael Newton
Application Number:
JP2003098364A
Publication Date:
March 14, 2007
Filing Date:
April 01, 2003
Export Citation:
Assignee:
Harris Corporation
International Classes:
H01L23/12; H01L21/48; H01L23/473; (IPC1-7): H01L23/12; H01L23/473
Domestic Patent References:
| JP63252456A | ||||
| JP3265194A | ||||
| JP6158113A |
Foreign References:
| US4833000 |
Attorney, Agent or Firm:
Tadahiko Ito
Shinsuke Onuki
Tadashige Ito
Shinsuke Onuki
Tadashige Ito